TMAH硅湿法刻蚀剂中异丙醇与氧化剂的协同作用

广西师范大学学报（自然科学版） ›› 2014, Vol. 32 ›› Issue (2): 55-59.

TMAH硅湿法刻蚀剂中异丙醇与氧化剂的协同作用

陈东^1,2, 刘诗斌¹, 梁晋涛³

1.西北工业大学电子信息学院,陕西西安,710072;
2. 西安邮电大学电子工程学院,陕西西安,710121;
3. 桂林电子科技大学环境与生命科学学院,广西桂林541004

收稿日期:2013-06-30 出版日期:2014-06-25 发布日期:2018-09-25
通讯作者: 陈东(1978—),男,四川南充人,西安邮电大学讲师,博士研究生。E-mail:dchen402@21cn.com
基金资助:
国家自然科学基金资助项目(60874101)

Synergistic Effect of Isopropyl Alcohol and Oxidant in Silicon Wet Etching with TMAH Etchant

CHEN Dong^1,2 , LIU Shi-bin¹ , LIANG Jin-tao³

1. School of Electronics and Information, Northwestern Polytechnical University, Xi’an shaanxi 710072, China;
2. School of Electronic Engineering, Xi’an University of Posts and Telecommunications, Xi’an shaanxi 710121, China;
3. School of Life and Environmental Sciences, Guilin University of Electronic Technology, Guilin Guangxi 541004, China

Received:2013-06-30 Online:2014-06-25 Published:2018-09-25

摘要/Abstract

摘要： 四甲基氢氧化铵(TMAH)是一种在微机电系统加工中常用的硅湿法刻蚀剂。在对含有铝结构表面的硅器件进行湿法刻蚀时,需要在TMAH溶液中添加一定量的硅酸和氧化剂,以保护器件表面的金属铝,但这会降低硅表面的光洁度。本文在含硅酸的TMAH溶液中同时添加过硫酸铵和异丙醇2种物质,研究其对TMAH刻蚀作用的影响。研究结果表明,2种物质的协同作用能够显著提高硅刻蚀表面的光洁度。

关键词: 四甲基氢氧化铵, 硅湿法刻蚀, 过硫酸铵, 异丙醇

Abstract: Tetramethyl ammonium hydroxide (TMAH) is a kind of silicon wet etchants frequently used in Micro-electromechanical Systems (MEMS). When etching a silicon device with aluminum structure on its surface, for protecting the aluminum structure, a quantity of silicic acid and oxidant are added into the TMAH solution, but doing so will result in the decline of surface smoothness. In this paper, two kinds of substance, isopropyl alcohol (IPA) and ammonium persulfate (AP) are simultaneously added into the TMAH solution in which silicic acid is resolved beforehand, and the effect on the etching performance of TMAH is studied. Result of the research reveals, the synergistic effect of IPA and AP can improve the smoothness of silicon etching surface remarkably.

Key words: TMAH, silicon wet etching, ammonium persulfate, isopropyl alcohol

中图分类号:

TN305

陈东, 刘诗斌, 梁晋涛. TMAH硅湿法刻蚀剂中异丙醇与氧化剂的协同作用[J]. 广西师范大学学报（自然科学版）, 2014, 32(2): 55-59.

CHEN Dong , LIU Shi-bin , LIANG Jin-tao. Synergistic Effect of Isopropyl Alcohol and Oxidant in Silicon Wet Etching with TMAH Etchant[J]. Journal of Guangxi Normal University(Natural Science Edition), 2014, 32(2): 55-59.

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